SMEAL WIKI

Boron Determination in Silicon by the Nuclear Track Technique

W. R. Thurber, B. Stephen Carpenter
Year1978
VenueJournal of The Electrochemical Society
Typearticle
Citations22
DOI10.1149/1.2131518
OpenAlexW2011362446

Topics

Integrated Circuits and Semiconductor Failure AnalysisBoronSiliconDopantNuclear trackMaterials science